Laser Self-Mixing Interferometer Based on Multiple Reflections and Phase-Modulation Technique
نویسندگان
چکیده
An improved method combining multiple reflections with the phase-modulation technique (MR-PM) is proposed to construct a self-mixing interferometer high accuracy. The phase modulation performed by using an electro-optic modulator that placed in external cavity. To broaden harmonic components spectrum of signal, multiple-reflection employed. By extracting orthogonal signals from spectrum, demodulation implemented realize displacement reconstruction. principle and signal processing approach are described detail. A series simulations experiments indicate measurement accuracy system can be effectively increase reflection times. vibration amplitude 44 nm has been proved measurable reconstruction error less than 3 nm. Due advantages broad range, will play significant role field non-contact nanometer measurement.
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ژورنال
عنوان ژورنال: Photonics
سال: 2022
ISSN: ['2304-6732']
DOI: https://doi.org/10.3390/photonics9060430